5 Patents
- US126092842026Adjustment of Power and Frequency Based on Three or More States
Lam Research Corporation
0 cites - US124013382025Multiple-output Radiofrequency Matching Module and Associated Methods
Lam Research Corporation
0 cites - US123810652025Methods and Apparatus for Controlling Plasma in a Plasma Processing System
Lam Research Corporation
0 cites - US120407702024Multiple-output Radiofrequency Matching Module and Associated Methods
Lam Research Corporation
0 cites - US117987842023Methods and Apparatus for Controlling Plasma in a Plasma Processing System
Lam Research Corporation
0 cites