Patents/Inventors

Boxue Chen

San Jose, CAUS2 patents

3 Patents

US124808932025
Optical and X-ray Metrology Methods for Patterned Semiconductor Structures with Randomness
KLA Corporation
0 cites
US124493862025
Forward Library Based Seeding for Efficient X-ray Scatterometry Measurements
KLA Corporation
0 cites
US120255752024
Soft X-ray Optics with Improved Filtering
KLA Corporation
0 cites