Patents/Inventors

Boris Volosskiy

San Jose, CAUS21 patents

12 Patents

US126019742026
Bake Strategies to Enhance Lithographic Performance of Metal-containing Resist
Lam Research Corporation
0 cites
US125851842026
Photoresist with Multiple Patterning Radiation-absorbing Elements And/or Vertical Composition Gradient
Lam Research Corporation
0 cites
US125108252025
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US125108262025
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US124364642025
Pre-exposure Photoresist Curing to Enhance EUV Lithographic Performance
Lam Research Corporation
0 cites
US124379952025
Tin Oxide Films in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites
US124179162025
Tin Oxide Films in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites
US122116912025
Dry Development of Resists
Lam Research Corporation
0 cites
US121835892024
Tin Oxide Mandrels in Patterning
Lam Research Corporation
0 cites
US121054222024
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US120947112024
Tin Oxide Films in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites
US120625382024
Atomic Layer Etch and Selective Deposition Process for Extreme Ultraviolet Lithography Resist Improvement
Lam Research Corporation
0 cites