Patents/Inventors

Boris Vasilyevich Potapkin

MoscowRU2 patents

3 Patents

US117768042023
Laser-sustained Plasma Light Source with Reverse Vortex Flow
KLA Corporation
0 cites
US116901622023
Laser-sustained Plasma Light Source with Gas Vortex Flow
KLA Corporation
0 cites
US115960482023
Rotating Lamp for Laser-sustained Plasma Illumination Source
KLA Corporation
0 cites