4 Patents
- US122116942025Ultra-high Modulus and Etch Selectivity Boron-carbon Hardmask Films
APPLIED MATERIALS, Inc.
0 cites - 0 cites
- US117281682023Ultra-high Modulus and Etch Selectivity Boron-carbon Hardmask Films
APPLIED MATERIALS, Inc.
0 cites - 0 cites