Patents/Inventors

Bohuslav Sed'a

BrnoCZ3 patents

4 Patents

US123805962025
Method and System for Determining Beam Position
FEI Company
0 cites
US121069332024
Method to Correct First Order Astigmatism and First Order Distortion in Multi-beam Scanning Electron Microscopes
FEI Company
0 cites
US120572872024
Methods and Systems for Aligning a Multi-beam System
0 cites
US116767952023
Charged Particle Beam Device for Inspection of a Specimen with a Plurality of Charged Particle Beamlets
FEI Company
0 cites