Bohang Zhu

3 Patents

• US125059742025

  Systems and Methods for Focusing Charged—particle Beams

  ASML Netherlands B.V.

  0 cites
• US120280002024

  Object Table Comprising an Electrostatic Clamp

  ASML Netherlands B.V.

  0 cites
• US116375122023

  Object Table Comprising an Electrostatic Clamp

  ASML Netherlands B.V.

  0 cites