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Inventors
Boaz Pnini
Valkenswaard
NL
3 patents
2 Patents
US12572081
2026
Optical System and Projection Exposure Apparatus
Carl Zeiss SMT GmbH
0 cites
US12504698
2025
Mounting for a Lithography System, and Lithography System
Carl Zeiss SMT GmbH
0 cites