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Inventors
Boaz Ophir
Haifa
IL
3 patents
3 Patents
US12535744
2026
Overlay Estimation Based on Optical Inspection and Machine Learning
KLA Corporation
0 cites
US12423803
2025
Predicting Tool Induced Shift Using Moiré Overlay Targets
KLA Con
0 cites
US11783466
2023
Machine Learning for Metrology Measurements
KLA CORPORATION
0 cites