Patents/Inventors

Bo Chen Chen

HsinchuTW6 patents

5 Patents

US125435282026
Contamination Control in Semiconductor Manufacturing Systems
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US122576102025
Apparatus and Method for Wafer Cleaning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120209642024
Contamination Control in Semiconductor Manufacturing Systems
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US119580902024
Apparatus and Method for Wafer Cleaning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US117667032023
Apparatus and Method for Wafer Cleaning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites