Birol Kuyel

4 Patents

• US121958502025

  Apparatus and Methods for Roll-to-roll (R2R) Plasma Enhanced/activated Atomic Layer Deposition (PEALD/PAALD)

  Nano-master, Inc.

  0 cites
• US121971252025

  Mask and Reticle Protection with Atomic Layer Deposition (ALD)

  Nano-master, Inc.

  0 cites
• US121805862024

  Apparatus and Methods for Roll-to-roll (R2R) Plasma Enhanced/activated Atomic Layer Deposition (PEALD/PAALD)

  Nanomaster, Inc.

  0 cites
• US116409002023

  Electron Cyclotron Rotation (ecr)-enhanced Hollow Cathode Plasma Source (HCPS)

  Nano-master, Inc.

  0 cites