3 Patents
- US117734792023Plasma Erosion Resistant Thin Film Coating for High Temperature Application
Applied Materials, Inc.
0 cites - US116803082023Plasma Erosion Resistant Rare-earth Oxide Based Thin Film Coatings
Applied Materials, Inc.
0 cites - US115877712023Chemistry Compatible Coating Material for Advanced Device On-wafer Particle Performance
Applied Materials, Inc.
0 cites