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Inventors
Bi-ming Yen
HsinChu
TW
2 patents
3 Patents
US12347692
2025
Wet Bench Process with In-situ Pre-treatment Operation
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US12165887
2024
Wafer Cleaning Apparatus and Method
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US11764081
2023
Wafer Cleaning Apparatus and Method
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites