11 Patents
- 0 cites
- 0 cites
- 0 cites
- US122031662025Apparatus and Methods for Performing an In-situ Etch of Reaction Chambers with Fluorine-based Radicals
ASM IP Holding B.V.
0 cites - 0 cites
- 0 cites
- US118982422024Methods for Forming a Polycrystalline Molybdenum Film Over a Surface of a Substrate and Related Structures Including a Polycrystalline Molybdenum Film
ASM IP Holding B.V.
0 cites