Patents/Inventors

Bhaskar Nagabhirava

Tigard, ORUS1 patent

2 Patents

US122610442025
Multi-layer Hardmask for Defect Reduction in EUV Patterning
International Business Machines Corporation
0 cites
US122371752025
Polymerization Protective Liner for Reactive Ion Etch in Patterning
International Business Machines Corporation
0 cites