Patents/Inventors

Bhadri Varadarajan

Beaverton, ORUS10 patents

3 Patents

US126010512026
Oxidation Resistant Protective Layer in Chamber Conditioning
Lam Research Corporation
0 cites
US117610792023
Oxidation Resistant Protective Layer in Chamber Conditioning
Lam Research Corporation
0 cites
US116085592023
Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites