Bhadri N. Varadarajan

14 Patents

• US123680752025

  Graphene Integration

  Lam Research Corporation

  0 cites
• US123593112025

  Conformal Deposition of Silicon Carbide Films Using Heterogeneous Precursor Interaction

  Lam Research Corporation

  0 cites
• US123314022025

  Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition

  Lam Research Corporation

  0 cites
• US123343322025

  Remote Plasma Based Deposition of Silicon Carbide Films Using Silicon-containing and Carbon-containing Precursors

  Lam Research Corporation

  0 cites
• US123004882025

  Doped or Undoped Silicon Carbide Deposition and Remote Hydrogen Plasma Exposure for Gapfill

  Lam Research Corporation

  0 cites
• US122725472025

  Conformal Deposition of Silicon Carbide Films

  Novellus Systems, Inc.

  0 cites
• US120000472024

  Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition

  Lam Research Corporation

  0 cites
• US119202392024

  Minimizing Radical Recombination Using ALD Silicon Oxide Surface Coating with Intermittent Restoration Plasma

  Lam Research Corporation

  0 cites
• US118942272024

  Conformal Deposition of Silicon Carbide Films

  Novellus Systems, Inc.

  0 cites
• US118481992023

  Doped or Undoped Silicon Carbide Deposition and Remote Hydrogen Plasma Exposure for Gapfill

  Lam Research Corporation

  0 cites
• US117323502023

  Films of Desired Composition and Film Properties

  Novellus Systems, Inc.

  0 cites
• US117086342023

  Films of Desired Composition and Film Properties

  Novellus Systems, Inc.

  0 cites
• US116803142023

  Films of Desired Composition and Film Properties

  Novellus Systems, Inc.

  0 cites
• US116803152023

  Films of Desired Composition and Film Properties

  Novellus Systems, Inc.

  0 cites