Patents/Inventors

Beom Soo Hwang

Suwon-siKR3 patents

3 Patents

US125526192026
Wafer Transfer Apparatus, Wafer Transfer System, and Method for Removing Particles in Wafer Transfer Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122335602025
Automated Gas Supply System
Samsung Electronics Co., Ltd.
0 cites
US119044802024
Automated Gas Supply System
Samsung Electronics Co., Ltd.
0 cites