Patents/Inventors

Benny Ku

BielefeldDE1 patent

2 Patents

US121642212024
Extreme Ultraviolet Light Reflective Structure Including Nano-lattice and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117622802023
Extreme Ultraviolet Light Reflective Structure Including Nano-lattice and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites