2 Patents
- US123621312025Method for Inspecting a Specimen and Charged Particle Beam Device
TECHNISCHE UNIVERSITEIT DELFT
0 cites - US117053012023Charged Particle Beam Manipulation Device and Method for Manipulating Charged Particle Beamlets
ICT Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh
0 cites