Patents/Inventors

Benjahman Julius Modeste

ElchingenDE1 patent

2 Patents

US123325762025
Method for Maintaining a Projection Exposure Apparatus, Service Module and Arrangement for Semiconductor Lithography
Carl Zeiss SMT GmbH
0 cites
US122226552025
Stop, Optical System and Lithography Apparatus
Carl Zeiss SMT GmbH
0 cites