8 Patents
- 0 cites
- 0 cites
- US125801522026Apparatus and Method of Damage Mitigation and Step Coverage Enhancement
Applied Materials, Inc.
0 cites - 0 cites
- 0 cites
- US123004972025Method and Apparatus of Low Temperature Plasma Enhanced Chemical Vapor Deposition of Graphene
Applied Materials, Inc.
0 cites - 0 cites
- 0 cites