Patents/Inventors

Barton Lane

Austin, TXUS13 patents

13 Patents

US125312052026
Equipment and Method for Improved Edge Uniformity of Plasma Processing of Wafers
Tokyo Electron Limited
0 cites
US125000672025
Apparatus for Edge Control During Plasma Processing
Tokyo Electron Limited
0 cites
US124513272025
Apparatus for Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US124127482025
Plasma Processing with Magnetic Ring X Point
Tokyo Electron Limited
0 cites
US122725202025
Process Control Enabled VDC Sensor for Plasma Process
Tokyo Electron Limited
0 cites
US122610172025
Resonant Antenna for Physical Vapor Deposition Applications
Tokyo Electron Limited
0 cites
US122241642025
Radio Frequency (RF) System with Embedded RF Signal Pickups
Tokyo Electron Limited
0 cites
US121761832024
RF Voltage and Current (V-I) Sensors and Measurement Methods
Tokyo Electron Limited
0 cites
US121192072024
Apparatus for Plasma Processing
Tokyo Electron Limited
0 cites
US120743902024
Parallel Resonance Antenna for Radial Plasma Control
Tokyo Electron Limited
0 cites
US119423072024
Plasma Processing with Radio Frequency (RF) Source and Bias Signal Waveforms
Tokyo Electron Limited
0 cites
US118172962023
RF Voltage and Current (V-I) Sensors and Measurement Methods
Tokyo Electron Limited
0 cites
US116004742023
RF Voltage and Current (V-I) Sensors and Measurement Methods
Tokyo Electron Limited
0 cites