Balasubramaniam Coimbatore Jaganathan

3 Patents

• US123924272025

  Insulated Fluid Lines in Chemical Mechanical Polishing

  Applied Materials, Inc.

  0 cites
• US117215632023

  Non-contact Clean Module

  Applied Materials, Inc.

  0 cites
• US117053542023

  Substrate Handling Systems

  Applied Materials, Inc.

  0 cites