Patents/Inventors

Ayuta Suzuki

YamanashiJP2 patents

3 Patents

US122116762025
Measurement System, Measurement Method, and Plasma Processing Device
Tokyo Electron Limited
0 cites
US120273442024
Film Forming Apparatus
Tokyo Electron Limited
0 cites
US116641982023
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites