Patents/Inventors

Aya Uchiyama

NaganoJP1 patent

2 Patents

US123409912025
Substrate Fixing Device
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites
US121257332024
Substrate Fixing Device, Electrostatic Chuck and Method of Manufacturing Electrostatic Chuck
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites