Patents/Inventors

Awnish Gupta

Hillsboro, ORUS9 patents

7 Patents

US125989302026
Conformal Thermal CVD with Controlled Film Properties and High Deposition Rate
Lam Research Corporation
0 cites
US124313492025
In-situ Control of Film Properties During Atomic Layer Deposition
Lam Research Corporation
0 cites
US124179432025
Reducing Intralevel Capacitance in Semiconductor Devices
Lam Research Corporation
0 cites
US124127422025
Impurity Reduction in Silicon-containing Films
Lam Research Corporation
0 cites
US122886852025
Modifying Hydrophobicity of a Wafer Surface Using an Organosilicon Precursor
Lam Research Corporation
0 cites
US121579452024
Thermal Atomic Layer Deposition of Silicon-containing Films
Lam Research Corporation
0 cites
US120376862024
Selective Carbon Deposition
Lam Research Corporation
0 cites