Patents/Inventors

Aurélie Kuroda

ChofuJP1 patent

2 Patents

US122304972025
Methods for Forming a Topographically Selective Silicon Oxide Film by a Cyclical Plasma-enhanced Deposition Process
ASM IP Holding B.V.
0 cites
US116107742023
Methods for Forming a Topographically Selective Silicon Oxide Film by a Cyclical Plasma-enhanced Deposition Process
ASM IP Holding B.V.
0 cites