Patents/Inventors

Atsushi Umekawa

ToyamaJP2 patents

3 Patents

US120657412024
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites
US120501382024
Substrate Processing Apparatus, and Thermocouple
KOKUSAI ELECTRIC CORPORATION
0 cites
US116949072023
Substrate Processing Apparatus, Recording Medium, and Fluid Circulation Mechanism
KOKUSAI ELECTRIC CORPORATION
0 cites