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Inventors
Atsushi Tsuboi
Tokyo
JP
2 patents
3 Patents
US12381112
2025
Method of Manufacturing Semiconductor Device
Tokyo Electron Limited
0 cites
US11818339
2023
Image Processing Apparatus and Image Processing Method
SONY CORPORATION
0 cites
US11605712
2023
Fabrication Process Flow of Dielectric Layer for Isolation of Nano-sheet Devices on Bulk Silicon Substrate
TOKYO ELECTRON LIMITED
0 cites