Atsushi Terasawa

3 Patents

• US126092772026

  Method for Determining Amount of Wear of Edge Ring, Plasma Processing Apparatus, and Substrate Processing System

  Tokyo Electron Limited

  0 cites
• US124467252025

  Apparatus, Method and Program

  DAITO ENTERTAINMENT, Inc.

  0 cites
• US116768002023

  Substrate Processing Apparatus and Control Method of Substrate Processing Apparatus

  TOKYO ELECTRON LIMITED

  0 cites