Patents/Inventors

Atsushi Shigenobu

TochigiJP1 patent

2 Patents

US121305622024
Method of Obtaining Array of Plurality of Regions on Substrate, Exposure Apparatus, Method of Manufacturing Article, Non-transitory Storage Medium, and Information Processing Apparatus
CANON KABUSHIKI KAISHA
0 cites
US119472672024
Method of Obtaining Array of Plurality of Shot Regions on Substrate, Exposure Method, Exposure Apparatus, Method of Manufacturing Article, Non-transitory Computer-readable Storage Medium, and Information Processing Apparatus
CANON KABUSHIKI KAISHA
0 cites