Patents/Inventors

Atsushi Sekiguchi

TokyoJP2 patents

3 Patents

US120515742024
Wafer Processing Method and Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US118759782024
Plasma Processing Apparatus and Plasma Processing Method
Hitachi High-tech Corporation
0 cites
US117985522023
Agent Device, Agent Control Method, and Program
HONDA MOTOR CO., Ltd.
0 cites