Patents/Inventors

Atsushi Sawachi

MiyagiJP11 patents

12 Patents

US124943832025
Gas Supply Device and Semiconductor Manufacturing Apparatus
FUJIKIN INCORPORATED
0 cites
US124244232025
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123775032025
Part Replacement System and Part Replacement Device
TOKYO ELECTRON LIMITED
0 cites
US123476602025
Substrate Processing Apparatus, Substrate Processing System, and Maintenance Method
TOKYO ELECTRON LIMITED
0 cites
US121701872024
Gas Supply System, Plasma Processing Apparatus, and Gas Supply Method
TOKYO ELECTRON LIMITED
0 cites
US120464542024
Performance Calculation Method and Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US120401662024
Substrate Processing Apparatus, Substrate Processing System, and Maintenance Method
TOKYO ELECTRON LIMITED
0 cites
US120338342024
Flow Rate Controller, Gas Supply System, and Flow Rate Control Method
TOKYO ELECTRON LIMITED
0 cites
US120026662024
Measuring Device, Measuring Method, and Vacuum Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119929122024
Part Replacement System and Part Replacement Device
TOKYO ELECTRON LIMITED
0 cites
US116986482023
Gas Supply System and Gas Supply Method
Tokyo Electron Limited
0 cites
US116948782023
Gas Supply System, Plasma Processing Apparatus, and Control Method for Gas Supply System
TOKYO ELECTRON LIMITED
0 cites