Patents/Inventors

Atsushi Kusaka

TochigiJP4 patents

4 Patents

US124297792025
Lithography Information Processing Apparatus, Lithography System, Storage Medium, Lithography Information Processing Method, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US122421872025
Magnification Ramp Scheme to Mitigate Template Slippage
Canon Kabushiki Kaisha
0 cites
US118158112023
Magnification Ramp Scheme to Mitigate Template Slippage
Canon Kabushiki Kaisha
0 cites
US116985832023
Imprint Apparatus and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites