Patents/Inventors

Atsushi Kubo

TokyoJP10 patents

11 Patents

US125731982026
Communication System, Output Device, Communication Method, Output Method, and Output Program
NEC CORPORATION
0 cites
US123621562025
Substrate Processing Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US122686722025
Pparδ Activator
JAPAN SCIENCE AND TECHNOLOGY AGENCY
0 cites
US122241942025
Substrate Processing System and Method for Controlling Substrate Processing System
Tokyo Electron Limited
0 cites
US122116762025
Measurement System, Measurement Method, and Plasma Processing Device
Tokyo Electron Limited
0 cites
US120768792024
Method of Processing Workpiece
DISCO CORPORATION
0 cites
US120464532024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US120464552024
Shower Plate, Lower Dielectric Member and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US118239422023
Thermocompression Bonding Method for Workpiece
DISCO CORPORATION
0 cites
US118046102023
Fuel Cell System
NATIONAL UNIVERSITY CORPORATION KANAZAWA UNIVERSITY
0 cites
US116263072023
Processing Apparatus
DISCO CORPORATION
0 cites