Patents/Inventors

Atsushi Itsuki

SakadoJP1 patent

2 Patents

US116138092023
Solid Vaporization/supply System of Metal Halide for Thin Film Deposition
KOJUNDO CHEMICAL LABORATORY CO., Ltd.
0 cites
US115663262023
Vaporizable Source Material Container and Solid Vaporization/supply System Using the Same
KOJUNDO CHEMICAL LABORATORY CO., Ltd.
0 cites