Patents/Inventors

Atsuko Shintani

TokyoJP1 patent

2 Patents

US122371452025
Charged Particle Beam Device and Inspection Device
HITACHI HIGH-TECH CORPORATION
0 cites
US117139632023
Pattern Shape Evaluation Device, Pattern Shape Evaluation System, and Pattern Shape Evaluation Method
HITACHI HIGH-TECH CORPORATION
0 cites