4 Patents
- US123915582025Silicon-containing Film Forming Composition and Method for Manufacturing Silicon-containing Film Using the Same
Merck Patent GmbH
0 cites - US120913232024Amorphous Silicon Forming Composition Comprising Block Copolymer and Method for Producing Amorphous Silicon Film Using Same
Marck Patent GmbH
0 cites - US120602762024Method for Producing Amorphous Silicon Sacrifice Film and Amorphous Silicon Forming Composition
Merck Patent GmbH
0 cites - US117608422023Composition Comprising Block Copolymer, and Method for Producing Siliceous Film Using the Same
MERCK PATENT GmbH
0 cites