Patents/Inventors

Asagi Matsugu

TokyoJP4 patents

5 Patents

US124035072025
Transfer Apparatus, Cleaning Module, and Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US122371942025
Substrate Transporter and Substrate Processing Apparatus Including Substrate Transporter
EBARA CORPORATION
0 cites
US119118682024
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium That Stores Program to Cause Computer in Substrate Processing Apparatus to Execute Substrate Processing Method
EBARA CORPORATION
0 cites
US118907162024
Polishing Unit, Substrate Processing Apparatus, and Polishing Method
EBARA CORPORATION
0 cites
US116389802023
Laminated Membrane, Substrate Holder Including Laminated Membrane, and Substrate Processing Apparatus
EBARA CORPORATION
0 cites