8 Patents
- US126006822026Monolithic Substrate Support Having Porous Features and Methods of Forming the Same
Applied Materials, Inc.
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- US125422602026Surface Topologies of Electrostatic Substrate Support for Particle Reduction
Applied Materials, Inc.
0 cites - 0 cites
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- US124826922025Efficient Dechucking and Particle Management in Process Chambers
Applied Materials, Inc.
0 cites - 0 cites