Patents/Inventors

Arunkumar Tatti

HaveriIN2 patents

3 Patents

US124630752025
Cathode Assembly for Integration of Embedded Electrostatic Chuck (ESC)
Applied Materials, Inc.
0 cites
US124379992025
Methods and Apparatus for Mask Patterning Debris Removal
APPLIED MATERIALS, Inc.
0 cites
US120681592024
Methods and Apparatus for Mask Patterning Debris Removal
APPLIED MATERIALS, Inc.
0 cites