5 Patents
- 0 cites
- US123728722025Extreme Ultraviolet (EUV) Lithography Using an Intervening Layer or a Multi-layer Stack with Varying Mean Free Paths for Secondary Electron Generation
LAM RESEARCH CORPORATION
0 cites - US120515892024Tin Oxide Thin Film Spacers in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites - US118697702024Selective Deposition of Etch-stop Layer for Enhanced Patterning
Lam Research Corporation
0 cites - US117840472023Tin Oxide Thin Film Spacers in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites