6 Patents
- US126092822026Multi-beam Charged Particle System and Method of Controlling the Working Distance in a Multi-beam Charged Particle System
Carl Zeiss Multisem GmbH
0 cites - US123409732025Particle Beam System Including a Multi-beam Deflection Device and a Beam Stop, Method for Operating the Particle Beam System and Associated Computer Program Product
Carl Zeiss Multisem GmbH
0 cites - 0 cites
- US122834572025Multiple Particle Beam Microscope and Associated Method with an Improved Focus Setting Taking Into Account an Image Plane Tilt
Carl Zeiss Multisem GmbH
0 cites - 0 cites
- US122494782025Particle Beam System for Azimuthal Deflection of Individual Particle Beams and Method for Azimuth Correction in a Particle Beam System
Carl Zeiss Multisem GmbH
0 cites