Patents/Inventors

Arkaprava Dan

San Jose, CAUS10 patents

10 Patents

US124697392025
Methods of Operating a Spatial Deposition Tool
Applied Materials, Inc.
0 cites
US124630932025
Method of Tuning Film Properties of Metal Nitride Using Plasma
APPLIED MATERIALS, Inc.
0 cites
US123052832025
Dithering or Dynamic Offsets for Improved Uniformity
Applied Materials, Inc.
0 cites
US120778612024
Dithering or Dynamic Offsets for Improved Uniformity
Applied Materials, Inc.
0 cites
US118238702023
PEALD Titanium Nitride with Direct Microwave Plasma
APPLIED MATERIALS, Inc.
0 cites
US117911722023
Methods of Controlling Gas Pressure in Gas-pulsing-based Precursor Distribution Systems
APPLIED MATERIALS, Inc.
0 cites
US117911902023
Apparatus and Methods for Real-time Wafer Chucking Detection
APPLIED MATERIALS, Inc.
0 cites
US116462262023
Method of Tuning Film Properties of Metal Nitride Using Plasma
Applied Materials, Inc.
0 cites
US116232532023
In-situ DC Plasma for Cleaning Pedestal Heater
APPLIED MATERIALS, Inc.
0 cites
US115990692023
Method for Auto-tuning and Process Performance Assessment of Chamber Control
Applied Materials, Inc.
0 cites