Arkalgud Sitaram

4 Patents

• US125753912026

  Methods for Fabricating Semiconductor Devices with Backside Power Delivery Network Using Laser Liftoff Layer

  Tokyo Electron Limited

  0 cites
• US125061122025

  Method for Etching of Metal

  Tokyo Electron Limited

  0 cites
• US118668312024

  Methods for Wet Atomic Layer Etching of Copper

  Tokyo Electron Limited

  0 cites
• US116108462023

  Protective Elements for Bonded Structures Including an Obstructive Element

  Adeia Semiconductor Bonding Technologies Inc.

  0 cites