Patents/Inventors

Arie Jeffrey Den Boef

WaalreNL39 patents

34 Patents

US125911792026
Metrology Apparatus
ASML Netherlands B.V.
0 cites
US125664062026
Dark Field Digital Holographic Microscope and Associated Metrology Method
ASML NETHERLANDS B.V.
0 cites
US124746422025
Metrology Method for Measuring an Etched Trench and Associated Metrology Apparatus
ASML Netherlands B.V.
0 cites
US124682352025
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US124293282025
Metrology Method, Target and Substrate
ASML NETHERLANDS B.V.
0 cites
US124114212025
Metrology Apparatus Based on High Harmonic Generation and Associated Method
ASML Netherlands B.V.
0 cites
US123994342025
Method of Determining a Characteristic of a Structure, and Metrology Apparatus
ASML Netherlands B.V.
0 cites
US123930462025
Metrology Systems, Coherence Scrambler Illumination Sources and Methods Thereof
ASML Holding N.V.
0 cites
US123668112025
Metrology System and Method for Determining a Characteristic of One or More Structures on a Substrate
ASML Netherlands B.V.
0 cites
US123266692025
Illumination Apparatus and Associated Metrology and Lithographic Apparatuses
ASML Netherlands B.V.
0 cites
US123065442025
Metrology Tool with Position Control of Projection System
ASML NETHERLANDS B.V.
0 cites
US122350962025
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
ASML Netherlands B.V.
0 cites
US121893052025
Metrology Method and Apparatus and Computer Program
ASML Netherlands B.V.
0 cites
US121584352024
Illumination and Detection Apparatus for a Metrology Apparatus
ASML NETHERLANDS B.V.
0 cites
US121302462024
Method for Overlay Metrology and Apparatus Thereof
ASML Netherlands B.V.
0 cites
US120869732024
Detection Apparatus for Simultaneous Acquisition of Multiple Diverse Images of an Object
ASML Netherlands B.V.
0 cites
US120667622024
On Chip Sensor for Wafer Overlay Measurement
ASML Holding N.V. & ASML Netherlands B.V.
0 cites
US120673402024
Computational Wafer Inspection
ASML NETHERLANDS B.V.
0 cites
US120614212024
Method and System for Determining Information About a Target Structure
ASML Netherlands B.V.
0 cites
US120136472024
Metrology Method
ASML NETHERLANDS B.V.
0 cites
US120077002024
Metrology System and Method for Determining a Characteristic of One or More Structures on a Substrate
ASML Netherlands B.V.
0 cites
US119534502024
Diffraction Based Overlay Metrology Tool and Method of Diffraction Based Overlay Metrology
ASML Netherlands B.V.
0 cites
US119472692024
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US119407392024
Metrology Apparatus
ASML Netherlands B.V.
0 cites
US118285852023
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
ASML Netherlands B.V.
0 cites
US118222542023
Metrology Apparatus and a Method of Determining a Characteristic of Interest
ASML NETHERLANDS B.V
0 cites
US118156752023
Metrology Device and Phase Modulator Apparatus Therefor Comprising a First Moving Grating and a First Compensatory Grating Element
ASML Netherlands B.V.
0 cites
US118031302023
Phase Modulators in Alignment to Decrease Mark Size
ASML Holding N.V.
0 cites
US117037722023
Recipe Selection Based on Inter-recipe Consistency
ASML NETHERLANDS B.V.
0 cites
US116500472023
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate
ASML Netherlands B.V.
0 cites
US116444282023
Diffraction Based Overlay Metrology Tool and Method of Diffraction Based Overlay Metrology
ASML Netherlands B.V.
0 cites
US116401162023
Metrology Method, Computer Product and System
ASML NETHERLANDS B.V.
0 cites
US116195952023
Diffraction Based Overlay Metrology Tool and Method of Diffraction Based Overlay Metrology
ASML Netherlands B.V.
0 cites
US115498062023
Metrology Apparatus
ASML Netherland B.V.
0 cites