Patents/Inventors

Aravind Alwan

Milpitas, CAUS2 patents

3 Patents

US125000682025
Edge Rings Providing Kinematic Coupling and Corresponding Substrate Processing Systems
Lam Research Corporation
0 cites
US121683012024
Fixture for Automatic Calibration of Substrate Transfer Robot
LAM RESEARCH CORPORATION
0 cites
US117987892023
Replaceable And/or Collapsible Edge Ring Assemblies for Plasma Sheath Tuning Incorporating Edge Ring Positioning and Centering Features
Lam Research Corporation
0 cites