Patents/Inventors

Arata Tatsumi

YokohamaJP3 patents

4 Patents

US124244212025
Apparatus and Method for Controlling a Substrate Temperature
NHK SPRING CO., Ltd.
0 cites
US122847312025
Heater and Stage Having the Heater
NHK SPRING CO., Ltd.
0 cites
US122117102025
Stage, Film-forming Apparatus, and Film-processing Apparatus
NHK SPRING CO., Ltd.
0 cites
US120007372024
Temperature Sensor and Heater Unit
NHK SPRING CO., Ltd.
0 cites