8 Patents
- US125623532026Replaceable Electrostatic Chuck Outer Ring for Edge Arcing Mitigation
Applied Materials, Inc.
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- US121989032025Plasma Resistant Arc Preventative Coatings for Manufacturing Equipment Components
Applied Materials, Inc.
0 cites - 0 cites
- US115519162023Sheath and Temperature Control of a Process Kit in a Substrate Processing Chamber
APPLIED MATERIALS, Inc.
0 cites - US115519602023Helical Plug for Reduction or Prevention of Arcing in a Substrate Support
APPLIED MATERIALS, Inc.
0 cites - 0 cites